XPS, IR and energy spectrum analysis results demonstrate that zinc related crystal defects in deposited zinc sulphide contain fine zinc particles existing in the center of petal and zinc hydrogenide when deposition temperature is lower than that of zinc evaporation. XPS,IR及能谱分析表明:当沉积温度低于锌蒸发温度时,生成的ZnS中与锌有关的晶体缺陷有Zn&H功能团及存在于花瓣状形态中心的锌微粒夹杂;